Indium Tin Oxide Target (ITO)
INTRODUCTION
ProTech Materials is a premier supplier of ITO and other various indium products. We offer high quality ITO targets through tightly controlled density, purity, and compositions. ProTech Materials provides integrated solutions to its customers including target materials, bonding and reclaims of spent targets. |
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ProTech Materials’ ITO targets are manufactured with proprietary processes in an integrated fashion starting from high purity indium metal, which is turned into indium tin oxide (ITO) nano powders through co-precipitation of In2O3 and SnO2, followed by hot consolidation and machining. The co-precipitation process ensures superior composition uniformity compared to mechanical mixture of In2O3 and SnO2.
COMMITMENT TO QUALITY
ProTech Materials is committed to delivering highly characterized ITO sputter target s. The quality control starts at testing incoming indium raw material for purity. The purity is then tested again on ITO powders to ensure that a minimum purity of 99.99% is maintained. In2O3:SnO2 ratio is also measured for the ITO powders to ensure correct composition. The main impurities are closely monitored on control charts. After the ITO powders are consolidated, density is measured as another important specification parameter. This quality system allows ProTech Materials to supply ITO targets of the highest quality standards with a high degree of lot to lot consistency.
INDIUM TIN OXIDE SPUTTERING TARGET 99.99% PURE
Typical Trace Elements
Element |
ppm |
|
Element |
ppm |
Cd |
6 |
|
Ca |
14 |
Mg |
<1 |
|
Cu |
<1 |
Pb |
<1 |
|
Sb |
<1 |
Fe |
13 |
|
|
|
Al |
<1 |
|
|
|
Ni |
2 |
|
|
|
Total metallic impurities < 100 ppm
Typical Physical Properties
Density |
≥99% |
|
Bulk Resistivity |
2-3×10 -4Ω.cm |
SEM picture of ITO target showing fine and uniform microstructure |
